Megasonic Cleaning Systems

Kaijo’s Quava Mega Puck Flow silicon wafer cleaning system is designed for a higher flow rate and higher rotational velocity near proximity cleaning of silicon wafers, semiconductor processing components, HDD Media, and FPD glass. The system provides the operator with more precise controls to direct high-power acoustic energy by scanning across large surfaces. The Quava Mega Puck Flow transducer is available in Stainless-steel (SUS) and Ethylene Chlorotrifluoroethylene (ECTFE).

Kaijo’s Megasonic Cleaning Systems include the Quava Megasonic state-of-the-art ultrasonic generator. One generator produces 1200 Watts of power with operating frequencies from 200 kHz to 950 kHz. Most importantly this system is especially effective in cleaning sub-micron particles from delicate parts and components. In addition, operators can use the system with any of Kaijo’s transducer arrays. Special features include: Soft Start / Soft Stop, Four output modes, No field calibration needed.

The Quava Mini Megasonic system can produce frequencies that range from 200 kHz to 1.6 MHz. It retains all the functions of the low frequency Quava Mini generator but is a turn-key solution with a set of transducers and tank included in the cleaning system. Operators can easily use the table top unit with single or multi frequencies to provide for the most precise cleaning applications.

Kaijo’s Quava Spot Shower is designed for superfine cleaning of delicate components including HDD media, Flat Panel Display glass and Semiconductor wafers. Users can direct high power acoustic energy to a spot from the end of the nozzle or from the side of the tube across an area of the surface. In addition users can operate the system at either 430 kHz or 950 kHz with the Kaijo Mega Tube nozzle.

Kaijo’s Quava Mega Puck Megasonic Cleaning System is designed for superfine cleaning of HDD Media, FPD glass, semiconductor wafers, and Semiconductor processing components. The system allows the operator to direct high-power acoustic energy or for scanning across large surfaces. The system can also be used with Spot Shower or Mega Tube nozzles.

The Mega Tube Megasonic Cleaner allows an operator to focus Megasonic energy to a specific location or to uniformly clean large substrates. Three insonification methods can be provided, which include tube tip, shower type, and tube sidewall. The tube nozzle allows a user to direct megasonic energy to tight spaces without the need for transducer clearance.

Kaijo’s US Shower is a high-frequency ultrasonic cleaner designed specifically for cleaning flat panel glass in a conveyor tool. The US Shower Operates at 950 kHz to clean areas ranging from 330 mm to 660 mm or larger. The system allows users to effectively remove contaminants with a particle size of less than 0.2 micrometers.