Quava Mega Puck Flow Silicon Wafer Cleaning System
Kaijo’s Quava Mega Puck Flow silicon wafer cleaning system is designed for a higher flow rate and higher rotational velocity near proximity cleaning of silicon wafers and other applications, including HDD Media, and FPD glass. The Mega Puck Flow megasonic transducer directs high-power acoustic energy by scanning across large surfaces. Kaijo offers a full line of high-performance Megasonic Cleaning systems and equipment to meet your specific cleaning requirements. If you have any questions about the Quava mega Puck Flow silicon wafer cleaning system or need more information on how our products can be used for your application, call us at 408 675-5575.
Quava Mega Puck Flow Silicon Wafer Cleaning System
Benefits:
- Optional Frequency and Oscillation mode selections can be used for different applications
- Provides superfine precise cleaning of silicon wafers, HHD media, and flat panel display glass
- Cost-effective and easy to use
- An effective Turn-key manufacturing solution
- Megasonic energy is directly applied to the target object
- An effective Turn-key manufacturing solution
- Higher flow rate than the original Mega Puck
- Greater allowable rotational velocity of target substrate than the original Mega Puck
- Greater allowable distance from the target substrate to clear holding pins
Features:
- Can be used with DI Water or Chemical
- Can communicate with host PC
- Remove output power control
- Output power meter with 4-digit display
- No field calibration is needed when replacing a generator or transducer
- High-frequency 950kHz
- Set point control in 0.1-watt increments
- Average power variation ±1%
- Programmable Soft Start and Soft Stop function
- Supply voltage range from 100 VAC to 240 VAC
Mega Puck Flow Generator Specifications
(WxDxH) in mm
Mega Puck Flow Megasonic Transducer Specifications
Mega Puck Flow Megasonic Transducer -top view
Mega Puck Flow Megasonic Transducer -side view
Mega Puck Flow Megasonic Transducer stainless steel -side view
Mega Puck Flow Megasonic Transducer stainless steel -bottom view
If you have any questions about the Quava Mega Puck Flow silicon wafer cleaning system or need more information on how our products can be used for your application, call us at 408 675-5575 or email info@kaijo-shibuya.com.
