US Shower Megasonic Cleaner
Kaijo’s US Shower is a high frequency Megasonic cleaner that is suitable for both flat panel and wafer cleaning. Three standard models are available that will provide effective cleaning of an area ranging from 330 mm to 660 mm. Custom and larger sizes are available. If you have any questions about the US Shower Megasonic Cleaner or need more information on how it can be used for your application call us at 408 675-5575.
Benefits:
- High quality and reliable industrial equipment at competitive pricing
- Effective cleaning for semiconductor wafers and flat panels
- May be used for topside or bottom side cleaning
Features:
- Can be equipped within a FPD cleaner with backside cleaning of substrate
- Hi Megasonic cleaning provides precise cleaning of particles of less than 0.2µm
- Provides less substrate damage due to high frequency (950kHz)
US Shower Megasonic Cleaner Specifications
Kaijo Mega Tube Megasonic Cleaner
Kaijo’s Mega Tube system allows a user to focus Megasonic energy to a point or to uniformly clean large substrates. Hi Megasonic energy is brought to the target by a choice of three irradiation (or insonification) methods which include tube tip, shower type and tube sidewall. The tube nozzle allows a user to direct megasonic energy to tight spaces without the need for transducer clearance. If you have any questions about the Mega Tube Megasonic Cleaner or need more information on how it can be used for your application call us at 408 675-5575.
Benefits:
- Provides an effective solution to uniformly clean large substrates
- Multiple options for precise cleaning using megasonic energy
- A Cost effective high frequency cleaning system
- An easy to use turn-key manufacturing solution
Features:
- Strait or custom bent tubes are available up 300mm long
- Low flow cleaning liquid
- Uniform and damage-less cleaning is practical
Mega Tube Megasonic Cleaner System provides three irradiation methods:
- End Irradiation: A high watt density spot of sonic energy emits from the quart tube end.
- Side Irradiation: Sonic energy passes through the quartz tube sidewall and into the cleaning fluid.
- Shower Irradiation: Sonic energy is carried through holes in the quartz tube.
1. End Irradiation
2. Side Irradiation
3. Shower Irradiation
Mega Tube Megasonic Cleaner Specifications:
If you have any questions about the US Shower or Mega Tube Megasonic Cleaners or need more information on how our products can be used for your application, call us at 408 675-5575 or email info@kaijo-shibuya.com.
